Wafer Inspection

Precise UV irradiance control and wavelength selection are required for many applications. A common example includes wafer inspection systems, which help semiconductor manufacturers to increase and then maintain integrated circuit chip yields.

In the future, small defects will become critical, so inspection systems will follow the lead of lithography and migrate to ultraviolet wavelengths. As a result, UV Filters which can endure high-power UV irradiation and reliably select the desired illumination wavelength will be required.