Such applications include sensor lids, where the coated substrate is close to the sensor elements with pixel sizes down to the micron range. For laser coatings with high laser power, coating defects are the starting point of laser-induced damage to the coating. In many biomedical applications, any kinds of particles and contamination are unacceptable.
Optical coatings on lids for high performance digital image sensors require very low densities of small defect sizes. Broadband anti-reflective coatings with low residual reflections and spectrally neutral performance eliminate ghost effects. Materion Balzers Optics offers superior low defect coatings and components produced in the cleanroom area.
Filter coatings with efficient near infrared (NIR) and optional ultraviolet (UV) blocking tightly shape the sensors' spectral response and limit the unwanted wavelength range. Details of spectral filter characteristics and wavelength ranges are optimized for customer specific requirements and applications.
Sensor internal reflections (ghost effects) can be eliminated by the use of an aperture on the sensor lid. Precision apertures are based on sputtered low reflectance chrome coating with a photolithography patterned clear aperture.